X‐ray microscopy and automatic detection of defects in through silicon vias in three‐dimensional integrated circuits
Summary
X‐ray microscopy and automatic detection of defects in through silicon vias in three‐dimensional integrated circuits is a scholarly article[1].
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X‐ray microscopy and automatic detection of defects in through silicon vias in three‐dimensional integrated circuits's instance of is recorded as scholarly article[2].
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APA4ort.xyz Knowledge Graph. (2026). X‐ray microscopy and automatic detection of defects in through silicon vias in three‐dimensional integrated circuits. Retrieved May 24, 2026, from https://4ort.xyz/entity/xray-microscopy-and-automatic-detection-of-defects-in-through-silicon-vias-in-threedimensional-integrated-circuits
MLA“X‐ray microscopy and automatic detection of defects in through silicon vias in three‐dimensional integrated circuits.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/xray-microscopy-and-automatic-detection-of-defects-in-through-silicon-vias-in-threedimensional-integrated-circuits.
BibTeX@misc{4ortxyz_xray-microscopy-and-automatic-detection-of-defects-in-through-silicon-vias-in-threedimensional-integrated-circuits_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{X‐ray microscopy and automatic detection of defects in through silicon vias in three‐dimensional integrated circuits}}, year = {2026}, url = {https://4ort.xyz/entity/xray-microscopy-and-automatic-detection-of-defects-in-through-silicon-vias-in-threedimensional-integrated-circuits}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): X‐ray microscopy and automatic detection of defects in through silicon vias in three‐dimensional integrated circuits — https://4ort.xyz/entity/xray-microscopy-and-automatic-detection-of-defects-in-through-silicon-vias-in-threedimensional-integrated-circuits (retrieved 2026-05-24)
