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Vertical integration of capacitive and piezo-resistive sensing units to enlarge the sensing range of CMOS-MEMS tactile sensor
Research article (2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), 2017) · cited 21× · AI/ML
Vertical integration of capacitive and piezo-resistive sensing units to enlarge the sensing range of CMOS-MEMS tactile sensor
Summary
Vertical integration of capacitive and piezo-resistive sensing units to enlarge the sensing range of CMOS-MEMS tactile sensor is a scholarly article[1].
Key Facts
Vertical integration of capacitive and piezo-resistive sensing units to enlarge the sensing range of CMOS-MEMS tactile sensor's instance of is recorded as scholarly article[2].
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APA4ort.xyz Knowledge Graph. (2026). Vertical integration of capacitive and piezo-resistive sensing units to enlarge the sensing range of CMOS-MEMS tactile sensor. Retrieved May 24, 2026, from https://4ort.xyz/entity/vertical-integration-of-capacitive-and-piezo-resistive-sensing-units-to-enlarge-the-sensing-range-of-cmos-mems-tactile-s
MLA“Vertical integration of capacitive and piezo-resistive sensing units to enlarge the sensing range of CMOS-MEMS tactile sensor.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/vertical-integration-of-capacitive-and-piezo-resistive-sensing-units-to-enlarge-the-sensing-range-of-cmos-mems-tactile-s.
BibTeX@misc{4ortxyz_vertical-integration-of-capacitive-and-piezo-resistive-sensing-units-to-enlarge-the-sensing-range-of-cmos-mems-tactile-s_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Vertical integration of capacitive and piezo-resistive sensing units to enlarge the sensing range of CMOS-MEMS tactile sensor}}, year = {2026}, url = {https://4ort.xyz/entity/vertical-integration-of-capacitive-and-piezo-resistive-sensing-units-to-enlarge-the-sensing-range-of-cmos-mems-tactile-s}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Vertical integration of capacitive and piezo-resistive sensing units to enlarge the sensing range of CMOS-MEMS tactile sensor — https://4ort.xyz/entity/vertical-integration-of-capacitive-and-piezo-resistive-sensing-units-to-enlarge-the-sensing-range-of-cmos-mems-tactile-s (retrieved 2026-05-24)
