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Thickness dependent microstructural and electrical properties of TiN thin films prepared by DC reactive magnetron sputtering
Research article (Ceramics International, 2015) · cited 110× · AI/ML
Thickness dependent microstructural and electrical properties of TiN thin films prepared by DC reactive magnetron sputtering
Summary
Thickness dependent microstructural and electrical properties of TiN thin films prepared by DC reactive magnetron sputtering is a scholarly article[1].
Key Facts
Thickness dependent microstructural and electrical properties of TiN thin films prepared by DC reactive magnetron sputtering's instance of is recorded as scholarly article[2].
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APA4ort.xyz Knowledge Graph. (2026). Thickness dependent microstructural and electrical properties of TiN thin films prepared by DC reactive magnetron sputtering. Retrieved May 24, 2026, from https://4ort.xyz/entity/thickness-dependent-microstructural-and-electrical-properties-of-tin-thin-films-prepared-by-dc-reactive-magnetron-sputte
MLA“Thickness dependent microstructural and electrical properties of TiN thin films prepared by DC reactive magnetron sputtering.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/thickness-dependent-microstructural-and-electrical-properties-of-tin-thin-films-prepared-by-dc-reactive-magnetron-sputte.
BibTeX@misc{4ortxyz_thickness-dependent-microstructural-and-electrical-properties-of-tin-thin-films-prepared-by-dc-reactive-magnetron-sputte_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Thickness dependent microstructural and electrical properties of TiN thin films prepared by DC reactive magnetron sputtering}}, year = {2026}, url = {https://4ort.xyz/entity/thickness-dependent-microstructural-and-electrical-properties-of-tin-thin-films-prepared-by-dc-reactive-magnetron-sputte}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Thickness dependent microstructural and electrical properties of TiN thin films prepared by DC reactive magnetron sputtering — https://4ort.xyz/entity/thickness-dependent-microstructural-and-electrical-properties-of-tin-thin-films-prepared-by-dc-reactive-magnetron-sputte (retrieved 2026-05-24)
