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Textured hexagonal and cubic phases of AlN films deposited on Si (100) by DC magnetron sputtering and high power impulse magnetron sputtering
Textured hexagonal and cubic phases of AlN films deposited on Si (100) by DC magnetron sputtering and high power impulse magnetron sputtering
Summary
Textured hexagonal and cubic phases of AlN films deposited on Si (100) by DC magnetron sputtering and high power impulse magnetron sputtering is a scholarly article[1].
Key Facts
Textured hexagonal and cubic phases of AlN films deposited on Si (100) by DC magnetron sputtering and high power impulse magnetron sputtering's instance of is recorded as scholarly article[2].
References
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Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.
APA4ort.xyz Knowledge Graph. (2026). Textured hexagonal and cubic phases of AlN films deposited on Si (100) by DC magnetron sputtering and high power impulse magnetron sputtering. Retrieved May 24, 2026, from https://4ort.xyz/entity/textured-hexagonal-and-cubic-phases-of-aln-films-deposited-on-si-100-by-dc-magnetron-sputtering-and-high-power-impulse-m
MLA“Textured hexagonal and cubic phases of AlN films deposited on Si (100) by DC magnetron sputtering and high power impulse magnetron sputtering.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/textured-hexagonal-and-cubic-phases-of-aln-films-deposited-on-si-100-by-dc-magnetron-sputtering-and-high-power-impulse-m.
BibTeX@misc{4ortxyz_textured-hexagonal-and-cubic-phases-of-aln-films-deposited-on-si-100-by-dc-magnetron-sputtering-and-high-power-impulse-m_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Textured hexagonal and cubic phases of AlN films deposited on Si (100) by DC magnetron sputtering and high power impulse magnetron sputtering}}, year = {2026}, url = {https://4ort.xyz/entity/textured-hexagonal-and-cubic-phases-of-aln-films-deposited-on-si-100-by-dc-magnetron-sputtering-and-high-power-impulse-m}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Textured hexagonal and cubic phases of AlN films deposited on Si (100) by DC magnetron sputtering and high power impulse magnetron sputtering — https://4ort.xyz/entity/textured-hexagonal-and-cubic-phases-of-aln-films-deposited-on-si-100-by-dc-magnetron-sputtering-and-high-power-impulse-m (retrieved 2026-05-24)
