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Sub-30 keV patterning of HafSOx resist: Effects of voltage on resolution, contrast, and sensitivity

Research article (Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena, 2016) · cited 10× · AI/ML
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Sub-30 keV patterning of HafSOx resist: Effects of voltage on resolution, contrast, and sensitivity

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Sub-30 keV patterning of HafSOx resist: Effects of voltage on resolution, contrast, and sensitivity is a scholarly article[1].

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  • Sub-30 keV patterning of HafSOx resist: Effects of voltage on resolution, contrast, and sensitivity's instance of is recorded as scholarly article[2].

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APA 4ort.xyz Knowledge Graph. (2026). Sub-30 keV patterning of HafSOx resist: Effects of voltage on resolution, contrast, and sensitivity. Retrieved May 24, 2026, from https://4ort.xyz/entity/sub-30-kev-patterning-of-hafsox-resist-effects-of-voltage-on-resolution-contrast-and-sensitivity
MLA “Sub-30 keV patterning of HafSOx resist: Effects of voltage on resolution, contrast, and sensitivity.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/sub-30-kev-patterning-of-hafsox-resist-effects-of-voltage-on-resolution-contrast-and-sensitivity.
BibTeX @misc{4ortxyz_sub-30-kev-patterning-of-hafsox-resist-effects-of-voltage-on-resolution-contrast-and-sensitivity_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Sub-30 keV patterning of HafSOx resist: Effects of voltage on resolution, contrast, and sensitivity}}, year = {2026}, url = {https://4ort.xyz/entity/sub-30-kev-patterning-of-hafsox-resist-effects-of-voltage-on-resolution-contrast-and-sensitivity}, note = {Accessed: 2026-05-24}}
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