Revisitation of the structure zone model based on the investigation of the structure and properties of Ti, Zr, and Hf thin films deposited at 70–600 °C using DC magnetron sputtering
Research article (Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, 2018) · cited 14× · AI/ML
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Revisitation of the structure zone model based on the investigation of the structure and properties of Ti, Zr, and Hf thin films deposited at 70–600 °C using DC magnetron sputtering
Summary
Revisitation of the structure zone model based on the investigation of the structure and properties of Ti, Zr, and Hf thin films deposited at 70–600 °C using DC magnetron sputtering is a scholarly article[1].
Key Facts
- Revisitation of the structure zone model based on the investigation of the structure and properties of Ti, Zr, and Hf thin films deposited at 70–600 °C using DC magnetron sputtering's instance of is recorded as scholarly article[2].