Properties of Ti-oxide thin films grown in reactive magnetron sputtering with self-heating target

Research article (Vacuum, 2021) · cited 19× · AI/ML
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Properties of Ti-oxide thin films grown in reactive magnetron sputtering with self-heating target

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Properties of Ti-oxide thin films grown in reactive magnetron sputtering with self-heating target is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). Properties of Ti-oxide thin films grown in reactive magnetron sputtering with self-heating target. Retrieved May 24, 2026, from https://4ort.xyz/entity/properties-of-ti-oxide-thin-films-grown-in-reactive-magnetron-sputtering-with-self-heating-target
MLA “Properties of Ti-oxide thin films grown in reactive magnetron sputtering with self-heating target.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/properties-of-ti-oxide-thin-films-grown-in-reactive-magnetron-sputtering-with-self-heating-target.
BibTeX @misc{4ortxyz_properties-of-ti-oxide-thin-films-grown-in-reactive-magnetron-sputtering-with-self-heating-target_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Properties of Ti-oxide thin films grown in reactive magnetron sputtering with self-heating target}}, year = {2026}, url = {https://4ort.xyz/entity/properties-of-ti-oxide-thin-films-grown-in-reactive-magnetron-sputtering-with-self-heating-target}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Properties of Ti-oxide thin films grown in reactive magnetron sputtering with self-heating target — https://4ort.xyz/entity/properties-of-ti-oxide-thin-films-grown-in-reactive-magnetron-sputtering-with-self-heating-target (retrieved 2026-05-24)

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