Influence of the deposition parameters on the texture and mechanical properties of magnetron sputtered cubic MoNx thin films

Research article (Materialia, 2018) · cited 16× · AI/ML
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Influence of the deposition parameters on the texture and mechanical properties of magnetron sputtered cubic MoNx thin films

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Influence of the deposition parameters on the texture and mechanical properties of magnetron sputtered cubic MoNx thin films is a scholarly article[1].

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  • Influence of the deposition parameters on the texture and mechanical properties of magnetron sputtered cubic MoNx thin films's instance of is recorded as scholarly article[2].

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APA 4ort.xyz Knowledge Graph. (2026). Influence of the deposition parameters on the texture and mechanical properties of magnetron sputtered cubic MoNx thin films. Retrieved May 24, 2026, from https://4ort.xyz/entity/influence-of-the-deposition-parameters-on-the-texture-and-mechanical-properties-of-magnetron-sputtered-cubic-monx-thin-f
MLA “Influence of the deposition parameters on the texture and mechanical properties of magnetron sputtered cubic MoNx thin films.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/influence-of-the-deposition-parameters-on-the-texture-and-mechanical-properties-of-magnetron-sputtered-cubic-monx-thin-f.
BibTeX @misc{4ortxyz_influence-of-the-deposition-parameters-on-the-texture-and-mechanical-properties-of-magnetron-sputtered-cubic-monx-thin-f_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Influence of the deposition parameters on the texture and mechanical properties of magnetron sputtered cubic MoNx thin films}}, year = {2026}, url = {https://4ort.xyz/entity/influence-of-the-deposition-parameters-on-the-texture-and-mechanical-properties-of-magnetron-sputtered-cubic-monx-thin-f}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Influence of the deposition parameters on the texture and mechanical properties of magnetron sputtered cubic MoNx thin films — https://4ort.xyz/entity/influence-of-the-deposition-parameters-on-the-texture-and-mechanical-properties-of-magnetron-sputtered-cubic-monx-thin-f (retrieved 2026-05-24)

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