Film thickness effect on texture and residual stress sign transition in sputtered TiN thin films

Research article (Ceramics International, 2017) · cited 113× · AI/ML
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Film thickness effect on texture and residual stress sign transition in sputtered TiN thin films

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Film thickness effect on texture and residual stress sign transition in sputtered TiN thin films is a scholarly article[1].

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  • Film thickness effect on texture and residual stress sign transition in sputtered TiN thin films's instance of is recorded as scholarly article[2].

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APA 4ort.xyz Knowledge Graph. (2026). Film thickness effect on texture and residual stress sign transition in sputtered TiN thin films. Retrieved May 24, 2026, from https://4ort.xyz/entity/film-thickness-effect-on-texture-and-residual-stress-sign-transition-in-sputtered-tin-thin-films
MLA “Film thickness effect on texture and residual stress sign transition in sputtered TiN thin films.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/film-thickness-effect-on-texture-and-residual-stress-sign-transition-in-sputtered-tin-thin-films.
BibTeX @misc{4ortxyz_film-thickness-effect-on-texture-and-residual-stress-sign-transition-in-sputtered-tin-thin-films_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Film thickness effect on texture and residual stress sign transition in sputtered TiN thin films}}, year = {2026}, url = {https://4ort.xyz/entity/film-thickness-effect-on-texture-and-residual-stress-sign-transition-in-sputtered-tin-thin-films}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Film thickness effect on texture and residual stress sign transition in sputtered TiN thin films — https://4ort.xyz/entity/film-thickness-effect-on-texture-and-residual-stress-sign-transition-in-sputtered-tin-thin-films (retrieved 2026-05-24)

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