Home ›
Entities
› academia
› Exploring proximity effects and large depth of field in helium ion beam lithography: large-area dense patterns and tilted surface exposure
Exploring proximity effects and large depth of field in helium ion beam lithography: large-area dense patterns and tilted surface exposure
Research article (Nanotechnology, 2018) · cited 19× · AI/ML
Exploring proximity effects and large depth of field in helium ion beam lithography: large-area dense patterns and tilted surface exposure
Summary
Exploring proximity effects and large depth of field in helium ion beam lithography: large-area dense patterns and tilted surface exposure is a scholarly article[1].
Key Facts
Exploring proximity effects and large depth of field in helium ion beam lithography: large-area dense patterns and tilted surface exposure's instance of is recorded as scholarly article[2].
References
Programmatic citations — every numbered marker resolves to a verifiable graph row below.
Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.
APA4ort.xyz Knowledge Graph. (2026). Exploring proximity effects and large depth of field in helium ion beam lithography: large-area dense patterns and tilted surface exposure. Retrieved May 24, 2026, from https://4ort.xyz/entity/exploring-proximity-effects-and-large-depth-of-field-in-helium-ion-beam-lithography-large-area-dense-patterns-and-tilted
MLA“Exploring proximity effects and large depth of field in helium ion beam lithography: large-area dense patterns and tilted surface exposure.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/exploring-proximity-effects-and-large-depth-of-field-in-helium-ion-beam-lithography-large-area-dense-patterns-and-tilted.
BibTeX@misc{4ortxyz_exploring-proximity-effects-and-large-depth-of-field-in-helium-ion-beam-lithography-large-area-dense-patterns-and-tilted_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Exploring proximity effects and large depth of field in helium ion beam lithography: large-area dense patterns and tilted surface exposure}}, year = {2026}, url = {https://4ort.xyz/entity/exploring-proximity-effects-and-large-depth-of-field-in-helium-ion-beam-lithography-large-area-dense-patterns-and-tilted}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Exploring proximity effects and large depth of field in helium ion beam lithography: large-area dense patterns and tilted surface exposure — https://4ort.xyz/entity/exploring-proximity-effects-and-large-depth-of-field-in-helium-ion-beam-lithography-large-area-dense-patterns-and-tilted (retrieved 2026-05-24)
