Effects of wafer noise on the detection of 20-nm defects using optical volumetric inspection

Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2015) · cited 15× · AI/ML
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Effects of wafer noise on the detection of 20-nm defects using optical volumetric inspection

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Effects of wafer noise on the detection of 20-nm defects using optical volumetric inspection is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). Effects of wafer noise on the detection of 20-nm defects using optical volumetric inspection. Retrieved May 24, 2026, from https://4ort.xyz/entity/effects-of-wafer-noise-on-the-detection-of-20-nm-defects-using-optical-volumetric-inspection
MLA “Effects of wafer noise on the detection of 20-nm defects using optical volumetric inspection.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/effects-of-wafer-noise-on-the-detection-of-20-nm-defects-using-optical-volumetric-inspection.
BibTeX @misc{4ortxyz_effects-of-wafer-noise-on-the-detection-of-20-nm-defects-using-optical-volumetric-inspection_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Effects of wafer noise on the detection of 20-nm defects using optical volumetric inspection}}, year = {2026}, url = {https://4ort.xyz/entity/effects-of-wafer-noise-on-the-detection-of-20-nm-defects-using-optical-volumetric-inspection}, note = {Accessed: 2026-05-24}}
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