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Effects of sputtering and assisting ions on the orientation of titanium nitride films fabricated by ion beam assisted sputtering deposition from metal target
Research article (Materials Letters, 2016) · cited 27× · AI/ML
Effects of sputtering and assisting ions on the orientation of titanium nitride films fabricated by ion beam assisted sputtering deposition from metal target
Summary
Effects of sputtering and assisting ions on the orientation of titanium nitride films fabricated by ion beam assisted sputtering deposition from metal target is a scholarly article[1].
Key Facts
Effects of sputtering and assisting ions on the orientation of titanium nitride films fabricated by ion beam assisted sputtering deposition from metal target's instance of is recorded as scholarly article[2].
References
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APA4ort.xyz Knowledge Graph. (2026). Effects of sputtering and assisting ions on the orientation of titanium nitride films fabricated by ion beam assisted sputtering deposition from metal target. Retrieved May 24, 2026, from https://4ort.xyz/entity/effects-of-sputtering-and-assisting-ions-on-the-orientation-of-titanium-nitride-films-fabricated-by-ion-beam-assisted-sp
MLA“Effects of sputtering and assisting ions on the orientation of titanium nitride films fabricated by ion beam assisted sputtering deposition from metal target.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/effects-of-sputtering-and-assisting-ions-on-the-orientation-of-titanium-nitride-films-fabricated-by-ion-beam-assisted-sp.
BibTeX@misc{4ortxyz_effects-of-sputtering-and-assisting-ions-on-the-orientation-of-titanium-nitride-films-fabricated-by-ion-beam-assisted-sp_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Effects of sputtering and assisting ions on the orientation of titanium nitride films fabricated by ion beam assisted sputtering deposition from metal target}}, year = {2026}, url = {https://4ort.xyz/entity/effects-of-sputtering-and-assisting-ions-on-the-orientation-of-titanium-nitride-films-fabricated-by-ion-beam-assisted-sp}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Effects of sputtering and assisting ions on the orientation of titanium nitride films fabricated by ion beam assisted sputtering deposition from metal target — https://4ort.xyz/entity/effects-of-sputtering-and-assisting-ions-on-the-orientation-of-titanium-nitride-films-fabricated-by-ion-beam-assisted-sp (retrieved 2026-05-24)
