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Effect of porosity and pore size on dielectric constant of organosilicate based low-k films: An analytical approach
Research article (Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena, 2016) · cited 23× · AI/ML
Effect of porosity and pore size on dielectric constant of organosilicate based low-k films: An analytical approach
Summary
Effect of porosity and pore size on dielectric constant of organosilicate based low-k films: An analytical approach is a scholarly article[1].
Key Facts
Effect of porosity and pore size on dielectric constant of organosilicate based low-k films: An analytical approach's instance of is recorded as scholarly article[2].
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APA4ort.xyz Knowledge Graph. (2026). Effect of porosity and pore size on dielectric constant of organosilicate based low-k films: An analytical approach. Retrieved May 24, 2026, from https://4ort.xyz/entity/effect-of-porosity-and-pore-size-on-dielectric-constant-of-organosilicate-based-low-k-films-an-analytical-approach
MLA“Effect of porosity and pore size on dielectric constant of organosilicate based low-k films: An analytical approach.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/effect-of-porosity-and-pore-size-on-dielectric-constant-of-organosilicate-based-low-k-films-an-analytical-approach.
BibTeX@misc{4ortxyz_effect-of-porosity-and-pore-size-on-dielectric-constant-of-organosilicate-based-low-k-films-an-analytical-approach_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Effect of porosity and pore size on dielectric constant of organosilicate based low-k films: An analytical approach}}, year = {2026}, url = {https://4ort.xyz/entity/effect-of-porosity-and-pore-size-on-dielectric-constant-of-organosilicate-based-low-k-films-an-analytical-approach}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Effect of porosity and pore size on dielectric constant of organosilicate based low-k films: An analytical approach — https://4ort.xyz/entity/effect-of-porosity-and-pore-size-on-dielectric-constant-of-organosilicate-based-low-k-films-an-analytical-approach (retrieved 2026-05-24)
