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Effect of oxygen partial pressure on crystal quality and electrical properties of RF sputtered PZT thin films under the fixed Ar flow and sputtering pressure
Research article (Vacuum, 2019) · cited 12× · AI/ML
Effect of oxygen partial pressure on crystal quality and electrical properties of RF sputtered PZT thin films under the fixed Ar flow and sputtering pressure
Summary
Effect of oxygen partial pressure on crystal quality and electrical properties of RF sputtered PZT thin films under the fixed Ar flow and sputtering pressure is a scholarly article[1].
Key Facts
Effect of oxygen partial pressure on crystal quality and electrical properties of RF sputtered PZT thin films under the fixed Ar flow and sputtering pressure's instance of is recorded as scholarly article[2].
References
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APA4ort.xyz Knowledge Graph. (2026). Effect of oxygen partial pressure on crystal quality and electrical properties of RF sputtered PZT thin films under the fixed Ar flow and sputtering pressure. Retrieved May 24, 2026, from https://4ort.xyz/entity/effect-of-oxygen-partial-pressure-on-crystal-quality-and-electrical-properties-of-rf-sputtered-pzt-thin-films-under-the-
MLA“Effect of oxygen partial pressure on crystal quality and electrical properties of RF sputtered PZT thin films under the fixed Ar flow and sputtering pressure.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/effect-of-oxygen-partial-pressure-on-crystal-quality-and-electrical-properties-of-rf-sputtered-pzt-thin-films-under-the-.
BibTeX@misc{4ortxyz_effect-of-oxygen-partial-pressure-on-crystal-quality-and-electrical-properties-of-rf-sputtered-pzt-thin-films-under-the-_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Effect of oxygen partial pressure on crystal quality and electrical properties of RF sputtered PZT thin films under the fixed Ar flow and sputtering pressure}}, year = {2026}, url = {https://4ort.xyz/entity/effect-of-oxygen-partial-pressure-on-crystal-quality-and-electrical-properties-of-rf-sputtered-pzt-thin-films-under-the-}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Effect of oxygen partial pressure on crystal quality and electrical properties of RF sputtered PZT thin films under the fixed Ar flow and sputtering pressure — https://4ort.xyz/entity/effect-of-oxygen-partial-pressure-on-crystal-quality-and-electrical-properties-of-rf-sputtered-pzt-thin-films-under-the- (retrieved 2026-05-24)
