Effect of bias on structure mechanical properties and corrosion resistance of TiNx films prepared by ion source assisted magnetron sputtering

Research article (Thin Solid Films, 2019) · cited 27× · AI/ML
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Effect of bias on structure mechanical properties and corrosion resistance of TiNx films prepared by ion source assisted magnetron sputtering

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Effect of bias on structure mechanical properties and corrosion resistance of TiNx films prepared by ion source assisted magnetron sputtering is a scholarly article[1].

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  • Effect of bias on structure mechanical properties and corrosion resistance of TiNx films prepared by ion source assisted magnetron sputtering's instance of is recorded as scholarly article[2].

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APA 4ort.xyz Knowledge Graph. (2026). Effect of bias on structure mechanical properties and corrosion resistance of TiNx films prepared by ion source assisted magnetron sputtering. Retrieved May 24, 2026, from https://4ort.xyz/entity/effect-of-bias-on-structure-mechanical-properties-and-corrosion-resistance-of-tinx-films-prepared-by-ion-source-assisted
MLA “Effect of bias on structure mechanical properties and corrosion resistance of TiNx films prepared by ion source assisted magnetron sputtering.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/effect-of-bias-on-structure-mechanical-properties-and-corrosion-resistance-of-tinx-films-prepared-by-ion-source-assisted.
BibTeX @misc{4ortxyz_effect-of-bias-on-structure-mechanical-properties-and-corrosion-resistance-of-tinx-films-prepared-by-ion-source-assisted_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Effect of bias on structure mechanical properties and corrosion resistance of TiNx films prepared by ion source assisted magnetron sputtering}}, year = {2026}, url = {https://4ort.xyz/entity/effect-of-bias-on-structure-mechanical-properties-and-corrosion-resistance-of-tinx-films-prepared-by-ion-source-assisted}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Effect of bias on structure mechanical properties and corrosion resistance of TiNx films prepared by ion source assisted magnetron sputtering — https://4ort.xyz/entity/effect-of-bias-on-structure-mechanical-properties-and-corrosion-resistance-of-tinx-films-prepared-by-ion-source-assisted (retrieved 2026-05-24)

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