Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN

Research article (Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, 2019) · cited 15× · AI/ML
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Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN

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Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN. Retrieved May 24, 2026, from https://4ort.xyz/entity/effect-of-aln-seed-layer-on-crystallographic-characterization-of-piezoelectric-aln
MLA “Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/effect-of-aln-seed-layer-on-crystallographic-characterization-of-piezoelectric-aln.
BibTeX @misc{4ortxyz_effect-of-aln-seed-layer-on-crystallographic-characterization-of-piezoelectric-aln_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN}}, year = {2026}, url = {https://4ort.xyz/entity/effect-of-aln-seed-layer-on-crystallographic-characterization-of-piezoelectric-aln}, note = {Accessed: 2026-05-24}}
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