Edge placement error fundamentals and impact of EUV: will traditional design-rule calculations work in the era of EUV?
Summary
Edge placement error fundamentals and impact of EUV: will traditional design-rule calculations work in the era of EUV? is a scholarly article[1].
Key Facts
Edge placement error fundamentals and impact of EUV: will traditional design-rule calculations work in the era of EUV?'s instance of is recorded as scholarly article[2].
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APA4ort.xyz Knowledge Graph. (2026). Edge placement error fundamentals and impact of EUV: will traditional design-rule calculations work in the era of EUV?. Retrieved May 24, 2026, from https://4ort.xyz/entity/edge-placement-error-fundamentals-and-impact-of-euv-will-traditional-design-rule-calculations-work-in-the-era-of-euv
MLA“Edge placement error fundamentals and impact of EUV: will traditional design-rule calculations work in the era of EUV?.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/edge-placement-error-fundamentals-and-impact-of-euv-will-traditional-design-rule-calculations-work-in-the-era-of-euv.
BibTeX@misc{4ortxyz_edge-placement-error-fundamentals-and-impact-of-euv-will-traditional-design-rule-calculations-work-in-the-era-of-euv_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Edge placement error fundamentals and impact of EUV: will traditional design-rule calculations work in the era of EUV?}}, year = {2026}, url = {https://4ort.xyz/entity/edge-placement-error-fundamentals-and-impact-of-euv-will-traditional-design-rule-calculations-work-in-the-era-of-euv}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Edge placement error fundamentals and impact of EUV: will traditional design-rule calculations work in the era of EUV? — https://4ort.xyz/entity/edge-placement-error-fundamentals-and-impact-of-euv-will-traditional-design-rule-calculations-work-in-the-era-of-euv (retrieved 2026-05-24)
