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Combining X-ray Nano Tomography with focused ion beam serial section imaging — Application of correlative tomography to integrated circuits

Research article (Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, 2021) · cited 18× · AI/ML
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Combining X-ray Nano Tomography with focused ion beam serial section imaging — Application of correlative tomography to integrated circuits

Summary

Combining X-ray Nano Tomography with focused ion beam serial section imaging — Application of correlative tomography to integrated circuits is a scholarly article[1].

Key Facts

  • Combining X-ray Nano Tomography with focused ion beam serial section imaging — Application of correlative tomography to integrated circuits's Application of correlative tomography to integrated circuits — instance of is recorded as scholarly article[2].

References

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Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

Class ancestry

  1. [1] ↑ . Wikidata. wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). Combining X-ray Nano Tomography with focused ion beam serial section imaging — Application of correlative tomography to integrated circuits. Retrieved May 24, 2026, from https://4ort.xyz/entity/combining-x-ray-nano-tomography-with-focused-ion-beam-serial-section-imaging-application-of-correlative-tomography-to-in
MLA “Combining X-ray Nano Tomography with focused ion beam serial section imaging — Application of correlative tomography to integrated circuits.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/combining-x-ray-nano-tomography-with-focused-ion-beam-serial-section-imaging-application-of-correlative-tomography-to-in.
BibTeX @misc{4ortxyz_combining-x-ray-nano-tomography-with-focused-ion-beam-serial-section-imaging-application-of-correlative-tomography-to-in_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Combining X-ray Nano Tomography with focused ion beam serial section imaging — Application of correlative tomography to integrated circuits}}, year = {2026}, url = {https://4ort.xyz/entity/combining-x-ray-nano-tomography-with-focused-ion-beam-serial-section-imaging-application-of-correlative-tomography-to-in}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Combining X-ray Nano Tomography with focused ion beam serial section imaging — Application of correlative tomography to integrated circuits — https://4ort.xyz/entity/combining-x-ray-nano-tomography-with-focused-ion-beam-serial-section-imaging-application-of-correlative-tomography-to-in (retrieved 2026-05-24)

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