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An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study
Research article (IEEE Transactions on Semiconductor Manufacturing, 2022) · cited 11× · AI/ML
An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study
Summary
An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study is a scholarly article[1].
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An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study's instance of is recorded as scholarly article[2].
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APA4ort.xyz Knowledge Graph. (2026). An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study. Retrieved May 24, 2026, from https://4ort.xyz/entity/an-autoencoder-based-approach-for-fault-detection-in-multi-stage-manufacturing-a-sputter-deposition-and-rapid-thermal-pr
MLA“An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/an-autoencoder-based-approach-for-fault-detection-in-multi-stage-manufacturing-a-sputter-deposition-and-rapid-thermal-pr.
BibTeX@misc{4ortxyz_an-autoencoder-based-approach-for-fault-detection-in-multi-stage-manufacturing-a-sputter-deposition-and-rapid-thermal-pr_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study}}, year = {2026}, url = {https://4ort.xyz/entity/an-autoencoder-based-approach-for-fault-detection-in-multi-stage-manufacturing-a-sputter-deposition-and-rapid-thermal-pr}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study — https://4ort.xyz/entity/an-autoencoder-based-approach-for-fault-detection-in-multi-stage-manufacturing-a-sputter-deposition-and-rapid-thermal-pr (retrieved 2026-05-24)
