Amplitude- and Gas Pressure-Dependent Nonlinear Damping of High-Q Oscillatory MEMS Micro Mirrors

Research article (Journal of Microelectromechanical Systems, 2018) · cited 37× · AI/ML
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Amplitude- and Gas Pressure-Dependent Nonlinear Damping of High-Q Oscillatory MEMS Micro Mirrors

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Amplitude- and Gas Pressure-Dependent Nonlinear Damping of High-Q Oscillatory MEMS Micro Mirrors is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). Amplitude- and Gas Pressure-Dependent Nonlinear Damping of High-Q Oscillatory MEMS Micro Mirrors. Retrieved May 24, 2026, from https://4ort.xyz/entity/amplitude-and-gas-pressure-dependent-nonlinear-damping-of-high-q-oscillatory-mems-micro-mirrors
MLA “Amplitude- and Gas Pressure-Dependent Nonlinear Damping of High-Q Oscillatory MEMS Micro Mirrors.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/amplitude-and-gas-pressure-dependent-nonlinear-damping-of-high-q-oscillatory-mems-micro-mirrors.
BibTeX @misc{4ortxyz_amplitude-and-gas-pressure-dependent-nonlinear-damping-of-high-q-oscillatory-mems-micro-mirrors_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Amplitude- and Gas Pressure-Dependent Nonlinear Damping of High-Q Oscillatory MEMS Micro Mirrors}}, year = {2026}, url = {https://4ort.xyz/entity/amplitude-and-gas-pressure-dependent-nonlinear-damping-of-high-q-oscillatory-mems-micro-mirrors}, note = {Accessed: 2026-05-24}}
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